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Chemical Monitoring

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

HORIBA’s range of products for chemical  process control and wet process monitoring are used throughout the semiconductor manufacturing process and other high performance applications to improve process stability and reduce waste. 

Chemical Concentration Monitor

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

In-line pH Monitors

pH is one of the most common parameters tested across a wide range of industries. HORIBA’s in-line pH monitors are used in the manufacturing process for various industries; including pharmaceuticals, food and beverage and agriculture.

Where there is a need to continuously measure pH, our high quality in-line pH monitors can help improve manufacturing quality and productivity by collecting and recording critical process data over time.


Ultra-Pure Water Monitor

Some manufacturing industries require a consistent and reliable source of purified or ultra-pure water. Examples of these are: Semiconductor, Pharmaceutical and Power Generation. Water is treated to remove impurities and conditioned depending on the application.

HORIBA offer a highly sensitive silica monitor for monitoring ultra-pure or purified water. This monitor is widely used in the cutting-edge semiconductor manufacturing process.

Related Products

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
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Fiber Optic Type Chemical Solution Concentration Monitor

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Fiber Optic Type Chemical Concentration Monitor

CS-620F
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Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

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High Precision, High Stability Chemical Concentration Monitor

CS-900
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Non-Contact Chemical Concentration Monitor

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HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

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Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

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HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

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Citric Acid Monitor

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KOH Monitor

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Phosphoric Acid Monitor

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Wide range TMAH Concentration Monitor

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High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
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Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960EM
HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor

HP-480(W)
HP-480(W)

Industrial pH meter

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

SLIA-300
SLIA-300

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

UP-100
UP-100

Micro Volume pH Monitor

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