D700WR

Wide Range Pressure Insensitive Mass Flow Module

The D700WR installs a new restrictor designed specifically for a wide range control application with high accuracy performance based on the CRITERION™ technology. D700WR can control flow rate down to 0.1% of full scale range which helps users to optimize the flexibility of gas delivery system. For example, if the system installs multiple MFCs for high and low flow rate control, users can reduce the number of MFCs and use another MFC in the same position for a different purpose.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Selection of countries and territories where this product is available:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
View the complete list here.

0.1～100% wide range control & high accuracy for low flow
- Provide flexibility to process optimization
≤ 500ms Step-up Response
- Deliver high productivity and greater process performance
Zero failure robust CIP pressue sensor
- Reduce down time and labor cost in high volume production
10x better valve shut-off and corrision resistance by PFA nozzle
- Robustness with less particle risk reduce down time and optimize yield
State Monitor Function
- Provide more internal data for smarter failure prediction

Output items of State monitor function

Flow/Pressure zero adjustment counts

Valve drive counts

Record of max/min P0,P1,P2 pressure

Record of max/min Block temperature

Total time over/below pressure spec.

Total time over/below temperature spec.

Total working time

Total control time

Total flow time (per calibration instance)

Total flow rate (per calibration instance)

Go to External drawing

*1 Please contact us for supported kinds of gas and glowrates.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10^-3 Pa (A).
*3 Output noise is included in Repeatability.
*4 Setting time is MFC output signal and N2 gas at 23 ℃. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*5 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*6 The "(TYP.)" value is a representative ability value at the time of in-house verification.
*7 PFA means Poly [tetrafluoroethylene-co-perfluoro (alkyl vinyl ether)]
*8 PCTFE means Polychlorotrifluoroethylene.
*9 After installation, be sure to perform zero point adjustment refer to "D707WR Zero Adfustment Procedure".
*10 EtherCAT^® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.