| Component | Ammonia*1 / Nitrogen Oxides |
| Model | APNA-370/CU-2 (High sensitivity model) |
| Principle | Cross Modulation Chemiluminescence Detection method + Oxidation catalyst |
| Range | 0 - 100 / 200 / 500 / 1000 ppb |
| Lower detection limit (LDL) *Typical value under certain conditions | 1 ppb |
| Response time (T90) | Within 5 minutes from CU-2 sample inlet |
| Displayed components | Instantaneous value of NH3 / NOx |
| Analog output | 4 - 20 mA DC or 0 - 1 V DC |
| Communication interface | RS-232C or TCP/IP |
| Sample gas flow | Approx. 2.0 L/min |
| Operation gas | N/A |
| Calibration gas | Dilute N2 based NO gas with SGGU-610 |
| Ambient temperature | Equivalent to cleanroom temperature |
| Ambient humidity | Equivalent to cleanroom humidity |
| Power | AC100 - 120 V, AC 200 - 240 V |
| Configuration (analyzer & calibration equipment) | APNA-370/CU-2 (High sensitivity model) SGGU-610 (with special NH3 scrubber for zero gas) |
*1: Ammonia with amine included
・CU-2: converter, SGGU-610: standard gas generator







