UP-100

Micro Volume pH Monitor

A pH monitor that embodies state-of-the-art precision technology.

Enabling measurements with an extremely small sample volume of 500μL (1 millionth of a liter) per measurement, making it suitable for continuous pH monitoring in various processes such as semiconductor cleaning/etching, food manufacturing, pharmaceutical production, bioprocessing, and more.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Continuous measurement is possible with trace sample volumes
The sample volume per measurement is 500μL (up to a maximum of 30mL/h), significantly reducing waste compared to sampling measurements. Additionally, data updates can take place as frequently as every minute.

Automatic calibration/maintenance-free
Equipped with an automatic calibration function where maintenance involves only the replacement of inner liquid and standard solution bottles every six months. Helps in the reduction of labor costs, consumables expenses, and equipment downtime.

UP-100 Specifications

Schematics

〈Catalog〉Semiconductor Analyzers for Wet Proces

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