Mass Flow Checker MFT-20

Mass Flow Checker

The MFT-20 offers a way of checking whether the mass flow controller (MFC) is operating normally by driving and controlling the MFC while monitoring the input and output voltages. In this manner, any abnormalities in the MFC or power supply can be quickly examined before being removed from the system piping.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Features
Specifications

Simplifies the checking procedure (no need to remove the piping)
No need for a power supply (operates on power from the existing signal cable)
Capable of fully opening and closing the valve
Automatic zero function available (only for SECs equipped with an automatic zero function)

Display	DC 20 V full scale/LCD display
Internal standard voltage	+5 VDC
Power source voltage	+7 to +30 VDC (normally used with +15 V mass flow controllers)
Power drain	6 mA or lower, in the voltage range shown above
Weight	400 g
Operating temperature	0 to 50°C

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