PV Series

Piezo Actuator Valve

The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. When combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) you can use the Piezo Actuator Valve PV Series to create a pressure control or flow rate control system.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Benefits:

Ultraclean due to an all metal construction
Wide flow range: from 1 CCM to 50 LM
High temperature models are available (PV-1000S/2000S)
Pressure control from an external unit

PV-1000

Flow Range	1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)

PV-2000

Flow Range	10/20 LM
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)