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i-CLUE

Fast Imaging Cathodoluminescence

The i-CLUE offers the highest performance Cathodoluminescence Imaging.

The fastest and easiest way to collect CL images providing a powerful structural analysis of your sample at the nanoscale.

Based on optical fiber modular design, i-CLUE is the corner stone solution that can be upgraded later in the field to F-CLUE full hyperspectral CL analysis system.

Thanks to the performance of high numerical aperture and low roughness collection mirror coupled to an optimized acquisition chain and detection, i-CLUE offers up to 10 times higher sensitivity compared to standard CL imaging solutions.

Featuring a compact and fully retractable interface, i-CLUE offers a convenient solution which can be fully integrated in most commercial electron microscopes while maintaining their original configuration.

The CL imaging scanning and processing being fully controlled by the Electron Microscope software, its usability is straightforward for the SEM specialist.

Segment: Scientific

Division: Custom Spectroscopy Solutions

Manufacturing Company: HORIBA France SAS

best price-to-performance ratio for a plug-and-play fast CL imaging module features:

Ultra-compact panchromatic CL detection
Manually retractable mirror
large field of view ellipsoidal mirror collection
Driven by EM software
Imaging touch-screen control

Spectral Range	Panchromatic CL
Diamond turned collection mirror	ellipsoidal mirror short & long working distances
200 mm retractable interface	Manual fine adjustment under vacuum
CL imaging detector	Panchromatic CL with ambient PMT
CL spectrometer type	N/A option upgrade to F-CLUE-e
Upgrade available	Upgrade to F-CLUE-e
Electron beam control	SEM software
Software	SEM software
Remote Controller	included
Clue Accessories	N/A
SEM Accessories	N/A

Defect Evaluation of GaN Epitaxial Wafer by CL

The threading dislocation occurs easily in GaN crystal grown on sapphire substrates. It is said that this is caused by the large lattice mismatch of sapphire and GaN. The crystal may seem to be uniform in the SEM image, but the dark spot such as the threading dislocation can be observed when measuring the CL intensity image at the wavelength (362nm) which corresponds to the band edge emission.