Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
| Model | MV-2000 |
|---|---|
| Liquid Material | All liquids except those corrosive to stainless steel(ex. HCl, HF) |
| Setting Temperature | By vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C) |
| Leak Integrity | ≤ 1 × 10-8 Pa·m3 /s (He) |
| Internal leak standard | ≤ 1 × 10-6 Pa·m3 /s (He) |
| Wetted parts | SUS316L , PFA |
| Temperature Sensor | Thermocouple type K (CA) |
| Pressure Resistance | 1MPa (G) |
| Standard Fitting | Liquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male |
| Operating Temperature | 15 - 50 ˚C |
| Option | Air valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) ) |
- The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
- The vaporizer has a heater, temperature sensor, and switch inside of it. Please contact us for more details on their specifications.
External Dimension
